Adiabatic plate for substrate processing apparatus



FIG. 1 is a front, bottom and right side perspective view of an adiabatic plate for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a right side elevational view thereof; and,

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2. 

CLAIM We claim the ornamental design for an adiabatic plate for substrate processing apparatus, as shown and described. 